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Chemical vapor deposition (CVD)

deposition of a solid material by chemical reaction of a gaseous precursor or mixture of precursors, commonly initiated by heat on a substrate [SOURCE: ISO 2080:2008, 2.2, modified.]

Oregon Nanoscience and Microtechnologies Institute
Oregon Nanoscience and Microtechnologies Institute
P.O. Box 2041 Corvalis, OR 97339 USA

ONAMI is Oregon’s first ‘Signature Research Center’ and a multi-level collaboration among Oregon’s research universities, Pacific Northwest National Laboratory and industry in the “Silicon Forest” high-tech cluster that is home to the world’s leading semiconductor, MEMS, nanotechnology tools and quantum dot industrial sites.

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